...静电力发生器;二元脉冲调宽静电力闭环方案 [gap=703]Key words：SAW accelerometer; electrostatic force feedback; electrostatic force producer; two state pulse width modulation electrostatic force closed loop plan ..
The structureof the electrostaticproducer is expatiated, and the methodwith which the pulse-widthmodulationfeedbackforcelinearizesthe electrostatic force producer is purposed.