... reduced load pressure；降低负载压力 reduced power；降低功率 reduced power level；降低功率水平 ...
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结果表明，通过对反应室压力、刻蚀气体流量和射频功率的调节，可以降低微负载效应的影响，得到良好的刻蚀均匀性。
It is proved that the uniformity of etch rate can be improved and the effect of micro load can be decreased by adjusting the value of chamber pressure, gas flow rate and RF power properly.
若外负载突然降低，液压泵进油压力将比正常情况增加3—4倍。
If the load suddenly decreases, the pressure in the inlet of pump will increase to 3-4 times as high as normal.
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