并给出远紫外光刻亚微米级图形的电镜扫描照片结果。
The results of electronic microscope scanning of sub-micrometer patterns by far ultraviolet lithography are given.
激光照射水银，在远紫外波长范围观察到一条新的水银谱线，波长为2882.2（?）
A now spectral line of 2882.2 A is observed at far UV wave length range.
其中高阶谐振的产生，由于可以作为产生真空远紫外线和软X射线的可能途径，受到人们的极大关注。
The most attractive one is high order harmonic generation (HHG), which can be used as a source of extreme ultraviolet (XUV) and soft X-ray lasers.
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