...软刻蚀，评述 [gap=730]patterning， tissue engineering， cellbased biosensors， selfassembled monolayer， soft lithography， review ...
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In this paper, PDMS square pillar arrays surface, parallel grating surface, papilla surface were fabricated by soft lithography.
本文采用软刻蚀法制备不同形貌的微图形表面，它们分别是PDMS方形柱阵列结构、平行光栅结构、乳突结构以及光滑表面。
参考来源 - 超疏水性表面的制备及血液相容性研究·2,447,543篇论文数据，部分数据来源于NoteExpress
提出了一种基于软刻蚀技术的复制和集成新工艺。
A new replication and integration techniques based on soft lithographical method are presented.
介绍了利用软刻蚀紫外模塑技术制作复制聚合物折射和衍射微透镜阵列的工艺过程。
Fabrication process of polymer microlens arrays is introduced based on soft lithographic UV-molding replication method.
系统介绍了芯片实验室的各种制备技术，这些技术包括紫外光刻、软刻蚀、LIGA技术、DEM技术、键合等。
Some polymer materials are used as substrate. Kinds of new microfabrication technology are presented, including lithography, soft etching, LIGA, DEM and bonding, etc.
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