介绍了无油超高真空系统、控制系统、烘箱与热功率以及软件的设计。
Oil free high vacuum system, control system, heat system, it's power and the control program have been introduced.
介绍X射线光学多层膜的构成原理、制作、测量方法及在超高真空系统中的研制技术。
The paper introduced the principle of structure of soft X-ray optics multilayers, and released the technique of measurement and fabrication of the multilayers in the UHV system.
本文给出了BEPC储存环超高真空系统运行期间所遇到的各种漏气行为及其相应检测的方法。
In this paper encounter some leaks behave and their methods of detection at operation time for UHV system of BEPC storage ring are discussed.
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