... 关键词：超精密磨床；超精密磨削；金刚石砂轮；硅片；集成电路（IC） [gap=908]KeyWords： Ultra-precision grinding machine； Ultra-precision grinding； Diamond grinding wheel； Silicon wafers； IC ..
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Ultra-precision grinding machine is one of the key equipments in integrated circuit manufacturing, which is mainly used in both manufacture of primary wafer and backside thinning of patterned wafer.
硅片超精密磨床是半导体集成电路(IC)制造中的关键设备,主要应用在大直径硅片制造和背面减薄加工中。
参考来源 - 超精密磨床监控系统的设计与开发·2,447,543篇论文数据，部分数据来源于NoteExpress
利用超精密磨床磨削加工6种典型的光学玻璃，先从理论上研究了脆性材料脆塑转变的临界值。
In this paper, the typical 6 kinds of optical glasses have been grinding by the ultra-precision grinding, brittle-ductile transition's critical depth of brittle materials is researched theoretically.
Jig 磨 床，超精密轴承球磨机，并其他专业磨床凑集可能每个容易被一篇文章超过这个的话题。
Jig grinders, ultra-precision bearing ball grinders, and a whole spectrum of other specialized grinders could each easily be the topic of an article longer than this one.
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