...学学报(自然科学版)》2004年01期 Elements,DOE)[1,2]:光束采样光栅(BeamSamplingGrating,BSG)和色分离光栅(ColorSeparateGrating,CSG).
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和色分离光栅 ColorSeparateGrating
As an example, we present a method for fabricating a color separate grating.
文中以色分离光栅为具体的例子，实现二元光学器件的直写。
参考来源 - 用于衍射空间成像的连续变空频干涉光刻技术·2,447,543篇论文数据，部分数据来源于NoteExpress
介绍了色分离光栅的设计原理，并对其制作工艺进行了研究。
The design principle and the fabrication process of color separation gratings are studied.
该色分离光栅近场分析和计算模拟方法也可用于其他衍射光学元件。
This near field analytical method can be adopted to other diffraction optics.
根据色分离光栅的实际制作过程建立了包含对位误差、占空比误差、刻蚀深度误差、塌边误差等多种制作误差的色分离光栅加工误差模型。
According to the practical fabrication process of CSG, a comprehensive fabrication error model of CSG including alignment error, duty cycle error, depth error and stair slope error is built up.
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