从得到的散射参数中提取出有效电感、Q值和自谐振频率。
The effective inductor, Q-factor and the self-resonant frequency are extracted from S-parameters.
电流测量探头采用自积分的罗柯夫斯基线圈，自积分电阻的电感、电容要尽可能的小，并采用同轴结构。
The Rogowski coil ranged in the same axis was used as current sensor, in which the self-integral resistance should has smaller inductance and smaller capacitance as possible.
采用调节射频电感性耦合等离子体中基片电极与地之间的外部电路阻抗的方法，控制基片电极的射频自偏压。
The RF self-bias of the substrate in an RF inductively coupled plasma is controlled by changing the impedance of an external circuit inserted between the substrate and the ground.
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