self aligned polysilicon process
... 自对准多晶硅化物：salicide 自对准多晶硅工艺：self aligned polysilicon process 自对准电极：self aligned electrode ...
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该工艺与已有的双层多晶硅自对准NPN晶体管工艺相兼容，可用于制造高性能的互补双极电路。
The process is compatible to the existing double poly-silicon self-aligned NPN transistor process, which can be used to fabricate high-performance complementary bipolar circuits.
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