又由于油膜具有均化作用,可以提高进给精度,在较长的行程上可以达到纳米级的定位分辨率。
Also because the lubricant film has the homogenization, may increase to feed precision, may achieve a nanometer level in the long traveling schedule the localization resolution.
采用平行板移动副设计了压电陶瓷驱动纳米级微进给工作台。
Using parallel board, a nanopositioner stage driven by piezoelectric ceramics (PZT) is designed.
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