设计了一套基于积分原理的准分子激光透镜阵列均束系统。
Based on the integral principle, a lens array homogenizer for excimer laser was designed.
该方法基于叠加积分原理，简单实用，并避免了对系统建模的复杂过程。
This method is based on the superposition integration principle. It is quite simple and useful. It avoids the complicated works for system mode building.
根据理论和实验结果，利用积分原理，对准分子激光扩束和分束整形，设计了一套准分子激光均束系统。
Based on the integral principle, by extending and splitting beam, a lenslet array homogenizer for excimer laser is designed.
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