硅多晶的西门子法制备 polycrystalline silicon manufacture by siemens process ..
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硅多晶的西门子法制备
Preparation of silicon polycrystalline by Siemens method
以上为机器翻译结果，长、整句建议使用 人工翻译 。
改良西门子法制备多晶硅存在的技术瓶颈是大量副产物四氯化硅难以回收利用。
It is difficult to recycle a large amount of by product, silicon tetrachloride, which is the technical bottleneck existing in preparation of polycrystalline silicon by improved Siemens process.
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