vacuum microbalance
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烘烤式真空微量天平 bakable vacuum microbalance
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本文研制了一种用于高精度膜厚监测的真空微量天平探头：半导体致冷器件恒温探头。
In this paper, a probe of vacuum microbalance to monitor and measure for high accuracy of film thickness is introduced, thermostatic probe of the semiconductor refrigeration device.
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