研究了直流等离子体化学汽相沉积（CVD）法合成的金刚石膜内应力随甲烷浓度、沉积温度的变化关系。
The internal stress in diamond thin films deposited by DC plasma CVD was studied as a function of methane concentration and deposited temperature.
研究了不同的甲烷浓度对金刚石织构变化趋势的影响。
The tendency of diamond texture change was studied on the condition of various methane concentration.
甲烷浓度的梯度变化比较大。
The variation of methane concentration gradient was greater.
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