基因芯片在一小块玻璃片上包含了数千种DNA小片段。
Gene chips contain several thousand small fragments of DNA on a small piece of glass.
每个所述芯片具有覆盖在所述氮化硅层和所述栅极结构上的具有预定厚度的共形的掺杂硅玻璃层。
Each chip is provided with conformal doped silicon glass layers which are covered on the silicon nitride layer and are covered on the gate structure and which have predetermined thickness.
传感器芯片在玻璃衬底上采用两步mems剥离工艺加工，加工工艺简单可靠。
The sensor was fabricated on ceramic substrate, using two step MEMS lift-off processes.
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