光刻是集成电路工艺中的关键性技术,其构想源自于印刷技术中的照相制版技术。
Lithography is the key technology in integrated circuit technology, the idea originated in printing technology in the photo lithographic process.
本文扼要地介绍了在改进硫酸钡涂料和照相乳剂的色调和白度方面的工艺开发研究和进展。
This paper introduces main research work carried out in the innovation of production technology for I...
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