... tantalum-oxide film 拼化钽膜 tantalum oxide films 氧化钽薄膜 common tantalum oxide 普通氧化钽 ...
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研究了氧气含量、薄膜缺陷、基底粗糙度等因素对氧化钽电学性能的影响。
The electrical properties as the function of oxygen percentage, defects in the films, and the roughness of the substrate surface were investigated.
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