vapor phase deposition 汽相淀积 ; 气相沉积系统 ; 气相沉积 ; 真空气相沉积 Axial Vapor Phase Deposition 轴汽态淀积 ..
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化学气相沉积系统 Hot-wall CVD
低压化学气相沉积系统 Low Pressure Chemical Vapor Deposition ; LPCVD
物理气相沉积真空系统 physical vapor deposition ; PVD
化学气相沉积真空系统 CVD ; Chemical Vapor Deposition
本系统中的数字量由PLC控制,数字量主要控制真空系统、烧结炉和化学气相沉积炉中各通气管路中的开关量。
In the system the digital is controlled by PLC, digital is mainly used to control the switch data of pipeline in the vacuum system and metallurgical vessel and CVD vessel.
采用气相沉积的方法在硅油表面成功制备了一种新型的铁薄膜系统,并研究了该薄膜的生长机制及其带状有序结构。
A new iron film system, deposited on silicone oil surfaces by vapor phase deposition method, has been fabricated and its growth mechanism and band-shaped ordered pattern were studied.
本文系统研究了石英钟罩式微波等离子体辅助化学气相沉积装置对沉积金刚石薄膜的影响。
In this paper diamond films were deposited using bell-jar type microwave plasma assisted CVD system.
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