高斯光束对标准硅球直径测量的影响分析。
Impact Analysis of Gaussian Beam on Measurement of Single Crystal Silicon Sphere Diameter.
通过对光学干涉系统结构设计和元件参数选择,最大限度地优化了干涉条纹的可见度,并设计出零背景光强标准硅球直径精密测量系统。
On the basis of structure design of optical system and parameter option of optical components, the visibility of interference fringe with zero background intensity is optimized.
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