研究了一种新型结构的光纤悬臂梁式振动传感器。
This paper deals with a novel type of optic fibre cantilever vibration sensor.
本文在分析现有悬臂梁式小力值传感器的基础上，提出一种带有加速度补偿梁的传感器结构。
On he basis of analysis of the original cantilever type transducer measuring smaller force, a transducer structure with acceleration compensating beam is presented.
基于MEMS技术和SOI CMOS技术提出了一个包含放大电路与悬臂梁式压阻传感器的集成化方案。
This paper presented an on-chip integration of SOI (Silicon on insulator) CMOS analog IC and piezoresistive cantilever based on the techniques of MEMS and SOI CMOS.
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