本文较为详细地论述了串联悬臂梁开关、并联悬臂梁开关和膜开关的工作原理及典型的性能参数。
In this paper, the operation principle and typical performance parameters of series cantilever beam switches, shunt cantilever beam switches and membrane switches are discussed in detail.
第三章给出了等截面悬臂梁微开关的微机械加工工艺，设计了掩膜版及具体的工艺参数。
Chapter three: Presents the fabrication process of micro-switch with cantilever beam and designed the masks.
报道了悬臂梁接触式RF MEMS开关的设计、制作和测试结果。
Design, fabrication and test results of DC-contact Cantilever RF MEMS Series Switches are reported.
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