讨论了低压微位移驱动电路及控制方法在光电轮廓仪上的运用。
The application of a low-voltage micro-displacement driving circuit and its control method on an optoelectronic profilometer are discussed.
本文报导了微位移驱动器的工作原理和用途以及我们研制这种驱动器的结果。
The paper reports the principles and applications of micro-displacement actuator and the results that we have developed.
仿真分析与测试结果都表明本课题所设计的压电微位移驱动器结构满足高分辨率、大行程的设计要求。
The results of experiment and results of analysis indicate the structure that this discourse designed can meet the request of large motion distance and high resolution.
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