采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜,可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。
Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.
通过压汞法毛细管压力曲线和铸体图象分析方法分析孔隙、喉道大小、分布及其几何形状,建立孔隙结构模型。
With mercury injection capillary curve and thin section, hole porosity and throats with their shapes and distributions are studied and porosity structure model is set up.
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