With the raise of substrate temperature, the surface roughness of LaF_3 single layer increased.
LaF_3表面粗糙度随基板温度升高而增大。
参考来源 - AlIn addition,the effects of substrate temperature,deposition rate,magnetic-field distribution, magnetic-field intensity,minus bias of the target,pressure of the chamber and target-substrate distance on the physical properties of thin film are studied.
本论文研究了基板温度、溅射速率、磁场分布、磁场强度、阴极靶负偏压、真空室内压强以及靶材-基板间距对成膜的影响。
参考来源 - 磁控溅射薄膜生长的计算机模拟研究·2,447,543篇论文数据，部分数据来源于NoteExpress
此外，随着基板温度的提高，损耗也会有所增加。
In addition, the optical loss increases with substrate temperature rising.
文中所论述的恒定的基板温度对沉积金刚石薄膜是非常重要的。
It's discussed that constant temperatures of substrate are very important to the deposition of the diamond film.
在可见光区域薄膜透射率和反射率随着基板温度的提高均有所下降。
The transmittance and reflectivity in the visible region of these films lowed with the increasing of the substrate temperature.
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