并提供了自制四探针测量仪的方法。
四探针测量金属薄膜电阻率是当今微电子技术领域中常用的方法。
A measurement of resistivity of metal film using four-point probe technique can be used as the general physics experiment.
测量的结果表明，利用单探针测量的主等离子体边缘参数与朗缪尔四探针测量结果基本一致。
The results obtained show that radial profiles of the temperature and the density measured with the single probe are in agreement to those with a four-probe system.
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