具体地说,提供用来补偿流动路径和质量流量控制器的压力环境中的压力瞬变现象的方法和系统。
In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
研究分析了基于质量流量控制器、可编程序控制器和触摸屏的自动控制系统气体流量自动控制方法。
The MOCVD system is specifically introduced, and the gas flow automatic control method based on the mass flow controller(MFC) and programmable logic controller(PLC) is studied and analyzed.
该便携式湿度发生器利用分流法湿度发生原理,采用微控制器和质量流量控制技术实现了自动发生不同流量、不同露点气体的功能,可为露点测试仪检定和校准提供动态标准湿度气体。
The portable humidity generator had the function of automatic generating standard gas of different flow and dewpoint by using the microprocessor and the technology of mass flow controlling.
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