采用双晶片探头和电子天平对PZT微力传感器进行静态力标定，进而利用双晶片探头和电荷放大器对PZT微力传感器进行准静态标定，微小信号检测通过锁相放大器来实现。
PZT micro -force sensors were calibrated by bimorph and electronic balance in static state and by bimorph and charge amplifier in dynamic state, small signal was tested by amplifier.
可配备多种不同频率、不同晶片尺寸的双晶探头使用；
Can is equipped with a variety of different frequencies, different wafer size twin probe using;
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