基于三种不同规模的半导体生产线模型,在非批加工设备使用不同的调度规则的情况下,对提出的SRB进行了仿真验证。
SRB was verified on three different scale semiconductor wafer fabrication facilities simulation models by applying various dispatching rules on non-batch processing machines.
通过对模糊神经网络训练,建立干扰和半导体生产线状态等输入参数与优化的重调度策略输出之间的映射关系。
The relation between the input of FNN, such as disturbance, system state parameters, and output of FNN, optimal rescheduling strategy, is built by FNN.
在分析半导体生产线调度分类的基础上,提出了组件化可重构半导体生产线调度体系结构。
Based on the classification on the scheduling for semiconductor wafer lines, the modular and reconfigurable framework is proposed.
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