发现适当降低聚焦加热灯强度、提高衬底加热温度可以降低固化前沿温度梯度,从而降低亚晶界等缺陷密度。
It is found that the temperature gradient of solidifying front edge could be reduced by reducing focused lamp intensity and increasing substrate temperature.
插上电源线插头,顺时针扭转调理温度旋钮,加热指示灯亮,即可进行加热。
Connect the power supply, turn the regulator knob clockwise, and the indicating lamp is lit, then it is ready for heating.
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