其中低温真空腔体是该系统中关键的装置，为光学元件的低温真空实验提供了必要的条件。
The cryogenic vacuum chamber is the key part of the system, which provides a necessary environment for the cryogenic vacuum experiment of the optical element.
该实验装置包括低温真空腔体、真空抽气系统、ZYGO干涉仪和防震平台以及监控测温系统。
The cryogenic optical experiment equipment was comprised of cryogenic vacuum chamber, vacuum set, ZYGO interferometer, proof vibration sub-system and controlled measuring temperature 'sub-system.
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