现在已经采用了低温吸附技术和吸气离子泵的近代电子抽气设备。
Recent electronic means of pumping using low temperature sorption techniques and getter-ion pumps have been introduced.
通过研究表明对大多数工艺，低温泵第一级控温在65K—100K比较合适，此时第二级处于12K—15K左右，处于低温吸附氢气和氦气的最佳范围内。
The study show to most of the technics Tl will be set in 65K-100K, then T2 will be in 12K-15K, it is a good temperature to cryo-adsorb Hydrogen, Helium.
气体捕集泵包括：吸附泵和低温泵等。
Trapping gas pump include: adsorption pumps and low-temperature pumps.
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