检测系统达到了亚像素级的位移分辨率。

Displacement resolution of sub pixel is achieved.

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整个微位移工作台结构简单，位移分辨率高，且能够实现双向可控运动。

The working table has a simple structure, high resolution of displacement, and can achieve two-way motion.

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压电陶瓷执行器具有位移分辨率高、响应快、刚度大、可微小化等优点，从而获得了广泛的应用。

Piezoceramic actuator exhibits remarkable properties such as high resolution, quick response, big stiffness and it is widely used.

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