A solar wafer slicing method was studied, which was based on complex dielectric fluid and efficiency electric discharge machining (EDM) and electric chemical machining (ECM) technique.
提出了一种基于复合工作液的、以电火花电解复合加工技术对太阳能硅片进行切割的工艺方法。
At last, the feasibility of the manufacture of micro-compressor with ECM-EDM complex technology is discussed, and advices are put forward for the later work.
最后本文探讨了一下电解电火花复合加工微型压气机的可行性，对今后的工作提出了一些意见。
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