In order to improve the dynamic positioning precision of scanning electrochemistry microscope(SECM), the mathematic modeling and controller design of the piezo-stage are studied.
为提高扫描电化学显微镜（SECM）微定位系统的运动定位精度，对其压电工作台的数学模型和控制器设计进行了研究。
The practical dynamic experimental results show that this method can make better filtering and calibration to the integration system, and the positioning precision is high.
通过实际动态试验表明，利用本文提出的方法可有效地对组合系统进行较好的滤波与校正，定位精度较高。
The experiment has testified the system positioning precision is improved, and the dynamic tracking ability is strong, too.
实验表明，系统的定位精度得到了提高，也有较强的动态跟踪能力。
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