dry etching 干蚀刻 ; [电子] 干法刻蚀 ; 干法腐蚀 ; 干腐蚀
dry etching reactor 干腐蚀反应器
dry etching apparatus 干腐蚀装置
dry etching system 干式蚀刻系统 ; 干蚀刻机 ; 干法刻蚀设备
ar ion beam dry etching ar离子束干法刻蚀
dry etching acknowledgeor 干腐蚀反响器
dry etching process 干法刻蚀 ; 干法蚀刻工艺
ICP dry etching ICP干法刻蚀
以上来源于: WordNet
The fabrication methods of MPC include electron beam lithography with subsequent evaporation and lift-off, interference lithography with dry-etching technology etc.
制备金属光子晶体方法包括：电子束刻蚀结合后续剥离法、激光干涉光刻结合干刻蚀技术等。
Dry etching technique of silicon is a very important process in the modern semiconductor industry.
对硅的干法刻蚀技术是现代半导体工业中非常重要的一项工艺。
Mechanism of dry etching damage and main causes for RIE induced - damage are investigated with RIE technique by utilizing PIN photodiodes.
采用rie法，利用PIN光电二极管，研究了干法腐蚀损伤机理及引起损伤的主要因素。
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