The evaluation method for the diffractive efficiency of the binary diffractive microlens array used in Shack - Hartmann wavefront sensor is studied according the project requirements.
根据实际工程需要，对用于萨克·哈特曼波前传感器的二元衍射微透镜列阵衍射效率的评价方法进行了研究。
Rigorous modal theory is used for analyzing their diffractive properties in sequence, and finally total diffractive efficiency of grating lenses can be easily obtained.
根据光栅透镜的线宽和间距微小渐变的特点，建立了光栅透镜的物理模型，并利用严格模式理论对其衍射特性进行分析。
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