B. VHF-PECVD7. In contrast with RF-PECVD, under lower deposition pressure (60 Pa), lower input power (40 W), high deposition rate (~lA/s) can be achieved, and high crystalline fraction can be achieved even on high silane concentration of 5%.8.
B．在甚高频条件下：7．与射频相比，低压低功率下即可实现较高的沉积速率，而且可以在相当高的硅烷浓度条件下(5％)，仍然保持一定的晶化率。
参考来源 - 微晶硅薄膜的高速沉积研究·2,447,543篇论文数据，部分数据来源于NoteExpress
The content of the crystalline fraction in lignocellulose depends on the lignin removal and increases with the decrease of the lignin content.
研究确定，浆中结晶纤维素含量取决于木素脱出程度并随着木素含量的降低而增加。
In addition, with the increasing distance between the filament and the substrate, the crystalline volume fraction and the grain size of poly-Si films notablely decrease.
另外，随着热丝与衬底间距的增大，沉积出的多晶硅薄膜样品的晶化率明显减小，薄膜的晶粒尺寸也相应减小。
The results indicate that the crystalline volume fraction (X_c) decrease firstly and then increase with the increase of excitation frequency.
结果发现材料的光敏性随频率的增加先降低后提高，晶化率和沉积速率的变化趋势与之相反；
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