Control strategy of detection platform for IC wafer and calibration technology in detection.
IC晶片检测平台的控制策略和检测中的标定技术研究。
Average wafer thickness value on basis of 100% control with an automatic inspection system.
晶片的平均厚度值以100%控制的自动检测系统的测量值为基础。
The flags of PMAC is used as the general I/O interface and the pneumatic control loop of the wafer robot is designed.
并将PMAC的标志控制口改作为通用I/O口，在此基础上进行了硅片传输机器人的气动控制回路的设计。
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