... chemical vapor epitaxy 化学汽相外延 chemical vapor etching 化学汽相蚀刻 co-verification environment 协同验证环境 ...
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The optical part can be done by applying Electron Beam Lithography (EBL), Inductively Coupled Plasma (ICP) etching, and Plasma-enhanced Chemical Vapor Deposition (PECVD).
利用电子束光刻、等离子体增强化学气相沉积、感应耦合等离子体刻蚀来实现跑道型微环谐振器的制备；
UHMWPE fiber were treated by chromic acid etching and chemical vapor depositing polypyrrole (PPy).
采用铬酸刻蚀和化学气相沉积聚吡咯处理了超高相对分子质量聚乙烯(UHMWPE)纤维。
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