The BCF model about smooth interface growth kinetics and the C V model about impurity stopping step have been collided with the AFM study results.

观察和研究的结果表明：关于光滑界面生长动力学的BCF模型、关于杂质对台阶生长阻碍作用的C V模型等已受到冲击与挑战；

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The breakdown voltage, permittivity, crystal structure, composition, surface and refractive index of the thin films were studied by I-V, C-V, XRD, EDS, AFM and elliptical polarization instrument.

X射线衍射仪、电子能谱仪、原子力显微镜和椭圆偏振仪等研究薄膜的击穿电压、介电常数、晶体结构、化学成分、表面形貌及薄膜的折射率。

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