简述了系统的结构和原理以及软件流程。
The structure, principle and soft clash technological process of the measurement system are presented.
特别讨论了取片和扩晶动作的结构和原理。
The structure and principle of the wafer picking and wafer expanding were discussed.
本文介绍低速高精度测量装置的结构和原理。
This paper presents the construction and principle of slow speed, high accuracy measure device.
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