并运用该工艺实现了微磁执行器。
介绍了MEMS的特点、特征、技术发展趋势，MEMS器件的类型及其功能，并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。
In this paper, the feature and the development trend of the MEMS technology are introduced. And the operational principles and the fabrication craft of the magnetic micro-actuator with a mult...
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