以硅、二氧化硅为原料，采用水热沉积法制备了球状纳米硅氧化物。
Spherical nanoscale silicon oxide have been prepared by hydrothermal deposition process using silicon and silica as the starting materials.
以硅烷和氧化二氮作为反应气体，采用等离子体增强化学气相沉积(PECVD)技术，不使用掺杂，在单晶硅衬底上制备了用于平面光波导的二氧化硅薄膜。
Without doping, plasma enhanced chemical vapor deposition (PECVD) of silica films on si substrates with gas mixtures of SiH_4 and N_2O is considered.
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