真空溅射镀膜设备中加热装置在镀膜时常出现打火现象，本文采用金属屏蔽和外壳接地的方法很好地解决了这一问题。

The heating equipment of vacuum sputter coating apparatus always sparks during sputtering, Using metal-screening and surface earth can solve this problem well.

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如果碳纳米管阴极附近的真空度太低，将产生打火、气体电离、离子回轰阴极等问题，将导致阴极发射电流的迅速衰减。

If the vacuum near the cathode is too poor, it will generate spark, gas ionization and ion bombardment on cathode, which can result in a fast attenuation of the emission current.

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