pirani gage
... Felix Pirani 菲力克斯·毕拉尼 Pirani gage 皮拉尼计 ; 皮喇尼真空计 Pirani gagek 皮拉尼计 ...
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皮拉尼真空计 Pirani vacuum gauge ; pirani gage ; PKR vacuum gauge
皮拉尼压力计 pirani gage ; hot-wire gauge
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本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
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