在此基础上为建立测量基准的传递方法、形成系统的光电侦察平台总体检测技术提供必要的准备和基础。
To set up transmission measurement method datum to form general measurement technique of systemically photoelectric reconnaissance platform, the static and dynamic angles were measured.
然后在重心检测理论分析的基础上研制了新型的四支点重心检测平台，以专用的称重传感器代替传统的磅秤或电子秤，使其测量精度和速度都有了很大提高。
Then design a new four-fulcrum testing platform, in which the special weight sensor is replaced for the conventional balance or electric balance to improve the measurement precision.
硅片调焦调平测量系统测试平台用于对光刻机硅片调焦调平测量系统的性能进行检测。
The Test Bench built for Wafer Focusing and Leveling Sensor is to measure and evaluate its performance.
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