它由校准系统、恒压式气体微流量计和抽气系统组成。
It is composed of a calibration system, a gas flowmeter and pumping system.
介绍了恒压式气体微流量计的组成和校准原理。
The structure and calibration theory of a constant pressure gas micro-flowmeter are introduced.
介绍了气体微流量标准装置对漏率的校准方法。
The calibration method of leakage rate with the gas low range standard apparatus is introduced.
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