本课题针对这些要求，进行了光学多波长干涉法在纳米测量领域的应用研究。
On this problem, this study was to make the multi-wavelengths interferometry researches on nanometer scale measurement.
近几年来，基于多波长干涉理论的绝对距离测量技术取得了很大的进展。
Absolute distance measurement based on multiple wavelengths interferometric theory has been progressing greatly in recent years.
在文中分析了多波长干涉术用于小尺寸测量的基本原理，提出了共光路的设计结构。
The design of common optical path structure improves the resistance to environment vibrations and temperature turbulence.
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