由于RTA的均匀化作用,氧化硅片表层的铁浓度显著低于氧化刚结束时硅片表层的铁浓度。
The iron concentration in the superficial layer of oxidized wafers after RTA decreases as a result of the homogenization effect of RTA.
床沙越粗、组成越不均匀,粗化作用越大,这一临界粒径也越大。
The thicker the sand bed, the non-uniform sand composition, then the larger armouring effect would be and the larger this critical size is correspondingly.
使衣物可以均匀接受酸化作用。
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