所说的光刻胶,又称光致抗蚀剂(Photoresist),是指通过紫外线、电子束、离子束、X-射线等的映射或者辐射,其消融度变了样子的耐蚀刻薄膜质料,经暴光和显影而使消融度增加的是正...
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...膜——>蚀刻——>检查 (备注:外层板) 光致抗蚀剂( Liquid Photoresist) 光致抗蚀剂(简称湿膜)是由感光性树脂,配合感光剂、色料、填料及溶剂等制成,经光照射后产生光聚...
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航海航天英语词汇大全第3372页 ... photo-resist光致抗蚀剂 photo-resist=photoresist光致抗蚀剂 photo-sensor光电传感器 ...
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光致抗蚀剂掩模 [电子] photoresist mask ; photolacquermask
双重光致抗蚀剂 double photoresist
光致抗蚀剂显影 development of photoresist
正作用光致抗蚀剂 postive working phtoresist
光致抗蚀剂掩模图形 photoresist mask pattern
柯达光致抗蚀剂 KPR Kodak photoresist ; Kodak photoresist
负性光致抗蚀剂 [材] negative photoresist
干膜光致抗蚀剂 dry-photoresist
高分辨率光致抗蚀剂 high-resolution photoresist
同现有的牺牲层材料相比,光致抗蚀剂作牺牲层材料具有一些优越性。
Comparing with all the existing sacrificial layer materials, the photoresist being used as sacrificial layers has some advantages.
规程的当中一个被使用在做整体集成电路克服这个问题是石版影印根据光致抗蚀剂。
One of the procedures used in making monolithic integrated circuits which overcomes this problem is photolithography based on photoresists.
根据本发明可提供能够适用于排出喷嘴式的抗蚀剂涂布法的正型光致抗蚀剂组合物。
The positive photoresist composition which is suitable for used in a resist coating method by a discharge nozzle system can be provided according to the invention.
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